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Multiple patterning
Results: 57

#	Item
51	Sub-10nm HP Patterning using EUV based Self-Aligned Double Patterning (P46) Sushil Padiyar Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-07-08 00:26:40 Sizing Multiple patterning Extreme ultraviolet lithography Extreme ultraviolet
52	Microsoft PowerPoint - Semicon TWINSCAN NXT1970Ci final (handout version).pptx Add to Reading List Source URL: www.semicontaiwan.org Language: English - Date: 2013-09-12 01:42:40 Wafer Extreme ultraviolet lithography Semiconductor device fabrication Immersion lithography Multiple patterning
53	Microsoft PowerPoint - BEUV Dublin1.3ho .ppt Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2010-12-02 11:22:35 22 nanometer 16 nanometer Ultraviolet Extreme ultraviolet 32 nanometer Multiple patterning 11 nanometer Angular resolution Next-generation lithography Electromagnetic radiation Extreme ultraviolet lithography Photolithography
54	2006 Lithography Update Michael Lercel And the rest of the Litho TWG’s Add to Reading List Source URL: www.itrs.net Language: English - Date: 2006-12-05 09:53:48 32 nanometer 45 nanometer Ultraviolet Resist Extreme ultraviolet lithography Microtechnology Materials science Multiple patterning Immersion lithography
55	2006 Lithography Update Michael Lercel And the rest of the Litho TWG’s Add to Reading List Source URL: www.itrs.net Language: English - Date: 2006-12-05 09:53:48 32 nanometer 45 nanometer Ultraviolet Resist Extreme ultraviolet lithography Microtechnology Materials science Multiple patterning Immersion lithography
56	INTERNATIONAL TECHNOLOGY ROADMAP FOR Add to Reading List Source URL: www.itrs.net Language: English - Date: 2012-01-10 11:47:02 Semiconductor device fabrication Extreme ultraviolet lithography Multiple patterning Computational lithography Photolithography Photomask Optical proximity correction Overlay Control 11 nanometer Microtechnology Materials science Technology
57	PDF Document Add to Reading List Source URL: www.itrs.net Language: English - Date: 2009-12-31 00:00:39 Semiconductor device fabrication Extreme ultraviolet lithography Multiple patterning Photolithography Photomask Immersion lithography Overlay Control Optical proximity correction Mask shop Microtechnology Materials science Nanotechnology

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